Due to the complexities typically associated with high voltage (1 kV) capacitance wafer-level testing, 1 kV C-V testing is usually limited to characterization labs or manual benchtop setups that are separate from a fab’s standard production workflow. This application note contains implementation details on the integration of 1 kV C-V testing into a production environment using Keithley’s S530-HV Parametric Test System.